WDS Wavelength Dispersive Spectroscopy

WDS - Wavelength Dispersive Spectroscopy - complements EDS by offering excellent peak separation, accurate trace element analysis, and optimised element detection for low and high energy X-rays to provide...

"Microprobe Accuracy on an SEM"


  • Accurate quantitative analysis below 500 ppm
  • Less than 10eV resolution for resolving important overlaps like Sulfur/Molybdenum
  • Easily and unambiguously determines the distribution of all elements in a sample even where peaks overlap
  • Up to 100 times more sensitive than an EDS system for trace element detection
  • Most accurate elemental analysis available for SEM rivals EPMA accuracy with WD for trace elements and ED for major elements using XPP quantitative correction algorithms