系統整合設計及方案

  1. SPARC- 陰極發光影樣分析系統
  2. SECOM- 光鏡電鏡聯用技術


SPARC- 陰極發光影樣分析系統


Nanophotonics

A scanning electron microscope’s tightly focused electron beam effectively behaves like a radiating dipole source at the electron impact position. The electric field generated by the electron beam excites the photonic modes and resonances of a photonic nano- and micro-structure over a spectral range spanning the entire UV/VIS/near-IR spectral range. Scanning electron microscopes make it possible to focus the electron beam to spot size smaller than 10 nm, enabling optical spectroscopy at a resolution 50-100 times smaller than the optical wavelength.

Nanomaterial characterization

In nanomaterial characterization, the small waist of the electron beam may be used to locally probe a nanostructure. The resulting cathodoluminescence spectrum can give information on material type, purity and defects. DELMIC produces systems that enable high collection and detection efficiencies, making it possible to investigate structures with low photon yield.

SPARC

SPARC is a cathodoluminescence imaging system for the study of nano- and micro-photonic structures that offers unsurpassed sensitivity, control and versatility.

The SPARC system has been designed for the needs of nano photonics researchers at the frontier of their field. The system offers unsurpassed collection and detection efficiency. This makes it ideally suitable for investigating nano structures, semiconductor materials, photonics crystals and more. In addition, the SPARC system offers the unique ability to perform angle-resolved spectroscopy of the emitted radiation. Using this technique the local bandstructure of periodic and aperiodic structures can be determined with a spatial resolution better than 10 nm.